図書

Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th international symposium on silicon science and the 1st international conference on advanced micro-device engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan : Dec 2009, Kiryu, Japan. (Key Engineering Materials ; 459)

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Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th international symposium on silicon science and the 1st international conference on advanced micro-device engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan : Dec 2009, Kiryu, Japan.

(Key Engineering Materials ; 459)

Call No. (NDL)
M17-19-564
Bibliographic ID of National Diet Library
028531912
Material type
図書
Author
International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan)ほか
Publisher
Trans Tech Publications Ltd
Publication date
[2011]
Material Format
Paper
Capacity, size, etc.
xii, 282 pages ; 25 cm.
NDC
-
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Notes on use

Note (General)：

Selected papers.

Other physical details：

illustrations

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Paper

Material Type
図書
ISBN
9780878492176
ISSN (series)
1013-9826
Title
Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th international symposium on silicon science and the 1st international conference on advanced micro-device engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan : Dec 2009, Kiryu, Japan.
Series Title
Key Engineering Materials ; 459
Title Heading
Key engineering materials ; v. 459.
Author Heading
International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan)
Hanaizumi, Osamu.
Unno, Masafumi.
Gunma Daigaku. International Education and Research Center for Silicon Science.
Gunma Daigaku. Advanced Technology Research Center.
International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryū-shi, Japan)
Publication, Distribution, etc.
Stafa-Zurich, Switzerland : Trans Tech Publications Ltd
Publication Date
[2011]
Publication Date (W3CDTF)
2011