Photomask Japan 2017: XXIV symposium on photomask and next-generation lithography mask technology : 5-7 April 2017 : Yokohama, Japan : PMJ2017 : photomask Japan conference : Apr 2017, Yokohama, Japan. (SPIE Proceedings ; 10454)

Photomask Japan 2017: XXIV symposium on photomask and next-generation lithography mask technology : 5-7 April 2017 : Yokohama, Japan : PMJ2017 : photomask Japan conference : Apr 2017, Yokohama, Japan.

(SPIE Proceedings ; 10454)

Call No. (NDL): M17-19-79
Bibliographic ID of National Diet Library: 028591560

Material type: 図書

Author: Photomask Japan.ほか

Publisher: SPIE

Publication date: [2017]

Material Format: Paper

Capacity, size, etc.: 1 volume (various pagings) ; 28 cm.

NDC: -

View All

Notes on use

Note (General)：: Papers.

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISBN: 9781510613898
ISSN (series): 0277-786X
Title: Photomask Japan 2017: XXIV symposium on photomask and next-generation lithography mask technology : 5-7 April 2017 : Yokohama, Japan : PMJ2017 : photomask Japan conference : Apr 2017, Yokohama, Japan.
Series Title: SPIE Proceedings ; 10454
Author Heading: Photomask Japan.
SPIE (Society)
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2017]
Publication Date (W3CDTF): 2017
Extent: 1 volume (various pagings)
Size: 28 cm.
Alternative Title: Photomask Japan 2017: 24 symposium on photomask and next-generation lithography mask technology : 5-7 April 2017 : Yokohama, Japan
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-19-79
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 028591560
http://id.ndl.go.jp/bib/028591560
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215