図書

33rd European mask and lithography conference : 26-28 June 2017 : Dresden, Germany : EMLC2017 : EMLC 2017 : Jun 2017, Dresden, Germany. (SPIE Proceedings ; 10446)

Icons representing 図書

33rd European mask and lithography conference : 26-28 June 2017 : Dresden, Germany : EMLC2017 : EMLC 2017 : Jun 2017, Dresden, Germany.

(SPIE Proceedings ; 10446)

Call No. (NDL)
M17-19-697
Bibliographic ID of National Diet Library
028782589
Material type
図書
Author
VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik.
Publisher
SPIE
Publication date
[2017]
Material Format
Paper
Capacity, size, etc.
1 volume (various pagings) ; 28 cm.
NDC
-
View All

Notes on use

Note (General)：

Papers."The conference has annually brought together ..."--Foreword."For the first time, the conference included two tutorials."--Foreword.

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
ISBN
9781510613560
ISSN (series)
0277-786X
Title
33rd European mask and lithography conference : 26-28 June 2017 : Dresden, Germany : EMLC2017 : EMLC 2017 : Jun 2017, Dresden, Germany.
Series Title
SPIE Proceedings ; 10446
Author Heading
VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik.
Publication, Distribution, etc.
Bellingham, Washington, USA : SPIE (出版)
Publication Date
[2017]
Publication Date (W3CDTF)
2017
Extent
1 volume (various pagings)