Handbook of thin film deposition

• Material Type: 図書
• ISBN: 0128123117; 9780128123119
• Title: Handbook of thin film deposition
• Author/Editor: edited by Krishna Seshan, Dominic Schepis.
• Edition: Fourth edition.
• Author Heading: Seshan, Krishna.; Schepis, Dominic.
• Publication, Distribution, etc.: Oxford, United Kingdom : William Andrew, and imprint of Elsevier (出版); Cambridge, MA, United States : William Andrew, and imprint of Elsevier (出版)
• Publication Date: [2018]
• Publication Date (W3CDTF): 2018
• Extent: xxi, 448 pages
• Other physical details: illustrations
• Size: 24 cm
• Place of Publication (Country Code): GB
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Thin films--Handbooks, manuals, etc.; Thin film devices--Design and construction.
• DDC: 621.3815/2
• NDLC: ND371
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND371-B116
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 028850283; http://id.ndl.go.jp/bib/028850283
• OCLC No.: 991746709; https://www.worldcat.org/oclc/991746709
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Contents: Section I. ScalingChapter 1. A Perspective on today's scaling challenges and possible future directions / Robert H. Dennard, Jim Cai, and Arvind Kumar...
• Summary, etc.: Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semicon...