Development of chemical mechanical polishing simulator based on tight-binding quantum chemical molecular dynamics theory and its application to design of precision polishing processes for semiconductor wafers

Development of chemical mechanical polishing simulator based on tight-binding quantum chemical molecular dynamics theory and its application to design of precision polishing processes for semiconductor wafers

Call No. (NDL): UT51-2018-A385
Bibliographic ID of National Diet Library: 029042291

Material type: 博士論文

Author: Kentaro Kawaguchi [著]

Publisher: [Kentaro Kawaguchi]

Publication date: [2017]

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 東北大学,博士(工学)

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Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: Development of chemical mechanical polishing simulator based on tight-binding quantum chemical molecular dynamics theory and its application to design of precision polishing processes for semiconductor wafers
Author/Editor: Kentaro Kawaguchi [著]
Author Heading: 河口, 健太郎カワグチ, ケンタロウ
Publication, Distribution, etc.: [Kentaro Kawaguchi]
Publication Date: [2017]
Publication Date (W3CDTF): 2017
Extent: 1冊
Alternative Title: 強結合量子分子動力学法に基づく化学機械研磨シミュレータの開発と半導体ウェハの精密研磨プロセス設計への応用キョウケツゴウリョウシブンシドウリキガクホウニモトズクカガクキカイケンマシミュレータノカイハツトハンドウタイウェハノセイミツケンマプロセスセッケイエノオウヨウ
Degree grantor/type: 東北大学
Date Granted: 平成29年3月24日
Date Granted (W3CDTF): 2017
Dissertation Number: 甲第17580号
Degree Type: 博士(工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Target Audience: 一般
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2018-A385
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 029042291
http://id.ndl.go.jp/bib/029042291
Bibliographic Record Category (NDL): 213