Optical microlithography XXXI : 27 February-1 March 2018 : San Jose, California, United States : Feb 2018, San Jose, CA. (SPIE Proceedings ; 10587)

Optical microlithography XXXI : 27 February-1 March 2018 : San Jose, California, United States : Feb 2018, San Jose, CA.

(SPIE Proceedings ; 10587)

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Material Type: 図書
ISBN: 9781510616660
ISSN (series): 0277-786X
Title: Optical microlithography XXXI : 27 February-1 March 2018 : San Jose, California, United States : Feb 2018, San Jose, CA.
Series Title: SPIE Proceedings ; 10587
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2018]
Publication Date (W3CDTF): 2018
Extent: 1 volume (various pagings)
Size: 28 cm.
Alternative Title: Optical microlithography 31 : 27 February-1 March 2018 : San Jose, California, United States
SPIE. advanced lithography
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-19-1552
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 029172577
http://id.ndl.go.jp/bib/029172577
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215