Micro and nano fabrication technology

• Material Type: 図書
• ISBN: 9789811300974 (print); 9811300976; 9789811300981 (electronic bk.); 9811300984 (electronic bk.); 9789811300998 (print and electronic bundle); 9811300992 (print and electronic bundle)
• Title: Micro and nano fabrication technology
• Author/Editor: Jiwang Yan, editor.
• Series Title: Micro/nano technologies; Springer reference
• Title Heading: Micro/nano technologies, 2522-5065
• Author Heading: Yan, Jiwang.
• Publication, Distribution, etc.: Singapore : Springer (出版)
• Publication Date: [2018]
• Publication Date (W3CDTF): 2018
• Extent: xx, 957 pages
• Other physical details: illustrations (some color)
• Size: 25 cm.
• Place of Publication (Country Code): SG
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Microfabrication--Technological innovations.; Engineering.; Nanotechnology and Microengineering.; Nanotechnology.; Medicine/Public Health, general.; Biomedical Engineering.
• LCC: TJ1191.5
• DDC: 670
• NDLC: M21
• Target Audience: 一般
• Holding library: 国立国会図書館
• Call No.: M21-B107
• Related Material (DOI): 10.1007/978-981-13-0098-1
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 029299400; http://id.ndl.go.jp/bib/029299400
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Contents: Part 1 Cutting technologyChapter 1 Micro chiseling of retroreflective arraysChapter 2 Micro milling for functional surface...
• Summary, etc.: This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisci...