International conference on extreme ultraviolet lithography 2018 : 17-20 September 2018 : Monterey, California, United States : EUVLS : EUVL symposium : Sep 2018, Monterey, CA. (SPIE Proceedings ; 10809)

International conference on extreme ultraviolet lithography 2018 : 17-20 September 2018 : Monterey, California, United States : EUVLS : EUVL symposium : Sep 2018, Monterey, CA.

(SPIE Proceedings ; 10809)

Call No. (NDL): M17-20-302
Bibliographic ID of National Diet Library: 029482455

Material type: 図書

Author: Interuniversity Micro-Electronics Center.

Publisher: SPIE

Publication date: [2018]

Material Format: Paper

Capacity, size, etc.: 1 volume (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers and presentations."The EUVL Symposium was for the second year co-organized together with Photomask 2018 Conference (PM) and was well attended."...

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Paper

Material Type: 図書
ISBN: 9781510622135
ISSN (series): 0277-786X
Title: International conference on extreme ultraviolet lithography 2018 : 17-20 September 2018 : Monterey, California, United States : EUVLS : EUVL symposium : Sep 2018, Monterey, CA.
Series Title: SPIE Proceedings ; 10809
Author Heading: Interuniversity Micro-Electronics Center.
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2018]
Publication Date (W3CDTF): 2018
Extent: 1 volume (various pagings)
Size: 28 cm.
Alternative Title: SPIE. photomask technology + EUV lithography
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers and presentations.
"The EUVL Symposium was for the second year co-organized together with Photomask 2018 Conference (PM) and was well attended."--Introduction.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-20-302
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 029482455
http://id.ndl.go.jp/bib/029482455
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215