Design-process-technology co-optimization for manufacturability XIII : 27-28 February 2019 : San Jose, California, United States : Feb 2019, San Jose, CA.

• Material Type: 図書
• ISBN: 9781510625716
• ISSN (series): 0277-786X
• Title: Design-process-technology co-optimization for manufacturability XIII : 27-28 February 2019 : San Jose, California, United States : Feb 2019, San Jose, CA.
• Series Title: SPIE Proceedings ; 10962
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
• Publication Date: [2019]
• Publication Date (W3CDTF): 2019
• Extent: 1 volume (various pagings)
• Size: 28 cm.
• Alternative Title: Design-process-technology co-optimization for manufacturability 13 : 27-28 February 2019 : San Jose, California, United States; Design-process-technology co-optimization for manufacturability XIII : at SPIE advanced lithography : 27-28 February 2019 : San Jose, California, United States
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-20-799
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 029840834; http://id.ndl.go.jp/bib/029840834
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215