Surface metrology for micro- and nanofabrication (Micro & nano technologies series)

Surface metrology for micro- and nanofabrication

(Micro & nano technologies series)

Call No. (NDL): M191-D5
Bibliographic ID of National Diet Library: 030453676

Material type: 図書

Author: Wei Gao

Publisher: Elsevier

Publication date: [2021]

Material Format: Paper

Capacity, size, etc.: xii, 438 pages ; 24 cm

NDC: -

Notes on use

Other physical details：: illustrations (some color)

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Paper

Material Type: 図書
ISBN: 0128178507
9780128178508
ISBN (error code): 9780128178515 (ePub ebook)
Title: Surface metrology for micro- and nanofabrication
Author/Editor: Wei Gao
Series Title: Micro & nano technologies series
Title Heading: Micro & nano technologies
Author Heading: 高, 偉コウ, イ ( 01126349 )Authorities
Publication, Distribution, etc.: Amsterdam, Netherlands : Elsevier (出版)
Publication Date: [2021]
著作権日付 : ©2021
Publication Date (W3CDTF): 2021
Extent: xii, 438 pages
Other physical details: illustrations (some color)
Size: 24 cm
Place of Publication (Country Code): NL
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
Subject Heading: Nanostructured materials--Measurement
Nanomanufacturing
DDC: 620.50287
NDLC: M191
Target Audience: 一般
Note (Bibliography): Includes bibliographical references and index
Holding library: 国立国会図書館
Call No.: M191-D5
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 030453676
http://id.ndl.go.jp/bib/030453676
OCLC No.: 1151198390
https://www.worldcat.org/oclc/1151198390
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 211