Applied optical metrology IV : 1-5 August 2021 : San Diego, California, United States : Aug 2021, San Diego, CA. (SPIE Proceedings ; 11817)

Applied optical metrology IV : 1-5 August 2021 : San Diego, California, United States : Aug 2021, San Diego, CA.

(SPIE Proceedings ; 11817)

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Material Type: 図書
ISBN: 9781510644724
ISSN (series): 0277-786X
Title: Applied optical metrology IV : 1-5 August 2021 : San Diego, California, United States : Aug 2021, San Diego, CA.
Series Title: SPIE Proceedings ; 11817
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2021]
Publication Date (W3CDTF): 2021
Extent: 1 volume (various pagings)
Size: 27 cm.
Alternative Title: Applied optical metrology 4 : 1-5 August 2021 : San Diego, California, United States
Applied optical metrology IV : at SPIE optical engineering + applications : 1-5 August 2021 : San Diego, California, United States
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references.
Holding library: 国立国会図書館
Call No.: M17-22-311
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 031835090
http://id.ndl.go.jp/bib/031835090
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215