Semiconductor process integration 12 : 12th symposium on semiconductor process integration : digital 240th ECS meeting : Oct 2021, ------. (ECS Transactions ; 104 (no. 4))

Semiconductor process integration 12 : 12th symposium on semiconductor process integration : digital 240th ECS meeting : Oct 2021, ------.

(ECS Transactions ; 104 (no. 4))

Call No. (NDL): M17-22-351
Bibliographic ID of National Diet Library: 031866158

Material type: 図書

Author: -

Publisher: The Electrochemical Society

Publication date: [2021]

Material Format: Paper

Capacity, size, etc.: 230 pages ; 24 cm.

NDC: -

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Notes on use

Note (General)：: Selected papers.Held online.

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Paper

Material Type: 図書
ISBN: 9781713836810
ISSN (series): 1938-5862
Title: Semiconductor process integration 12 : 12th symposium on semiconductor process integration : digital 240th ECS meeting : Oct 2021, ------.
Series Title: ECS Transactions ; 104 (no. 4)
Publication, Distribution, etc.: Pennington, NJ, USA : The Electrochemical Society (出版)
Publication Date: [2021]
Publication Date (W3CDTF): 2021
Extent: 230 pages
Size: 24 cm.
Alternative Title: Electronic materials and processing
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Selected papers.
Held online.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-22-351
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 031866158
http://id.ndl.go.jp/bib/031866158
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215