37th European mask and lithography conference : 20-23 June, 2022 : Leuven, Belgium : 37th EMLC 2022 : EMLC2022 : Jun 2022, Leuven, Belgium. (SPIE Proceedings ; 12472)

37th European mask and lithography conference : 20-23 June, 2022 : Leuven, Belgium : 37th EMLC 2022 : EMLC2022 : Jun 2022, Leuven, Belgium.

(SPIE Proceedings ; 12472)

Call No. (NDL): M17-23-197
Bibliographic ID of National Diet Library: 032630421

Material type: 図書

Author: VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik.ほか

Publisher: SPIE

Publication date: [2022]

Material Format: Paper

Capacity, size, etc.: 1 volume (various pagings) ; 28 cm.

NDC: -

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Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 9781510660496
ISSN (series): 0277-786X
Title: 37th European mask and lithography conference : 20-23 June, 2022 : Leuven, Belgium : 37th EMLC 2022 : EMLC2022 : Jun 2022, Leuven, Belgium.
Series Title: SPIE Proceedings ; 12472
Author Heading: VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik.
UBC Microelectronics (Germany)
Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
Publication Date: [2022]
Publication Date (W3CDTF): 2022
Extent: 1 volume (various pagings)
Size: 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references.
Holding library: 国立国会図書館
Call No.: M17-23-197
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 032630421
http://id.ndl.go.jp/bib/032630421
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215