17th international symposium on semiconductor cleaning science and technology : (SCST 17). (ECS Transactions ; 108 (no. 4))

17th international symposium on semiconductor cleaning science and technology : (SCST 17).

(ECS Transactions ; 108 (no. 4))

Notes on use

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 9781713863380
ISSN (series): 1938-5862
Title: 17th international symposium on semiconductor cleaning science and technology : (SCST 17).
Series Title: ECS Transactions ; 108 (no. 4)
Publication, Distribution, etc.: Pennington, NJ, USA : The Electrochemical Society (出版)
Publication Date: [2022]
Publication Date (W3CDTF): 2022
Extent: iii, 205 pages
Size: 24 cm.
Alternative Title: Electronic materials and processing
Additional Title: 241st meeting of the Electrochemical Society : May 2022, Vancouver, Canada.
Place of Publication (Country Code): US
Text Language Code: eng
Content Type: text
Media Type: unmediated
Carrier Type: volume
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-23-260
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 032654312
http://id.ndl.go.jp/bib/032654312
Cataloging Rule: RDA
Bibliographic Record Category (NDL): 215