図書

Advanced etch technology and process integration for nanopatterning XI : 24-28 April 2022 : San Jose, California, United States : 23-27 May 2022 : online : 2022, ------. (SPIE Proceedings ; 12056)

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Advanced etch technology and process integration for nanopatterning XI : 24-28 April 2022 : San Jose, California, United States : 23-27 May 2022 : online : 2022, ------.

(SPIE Proceedings ; 12056)

Call No. (NDL)
M17-23-365
Bibliographic ID of National Diet Library
032714946
Material type
図書
Author
Advanced Etch Technology for Nanopatterning (Conference) (11th : 2022 : San Jose, Calif.)ほか
Publisher
SPIE
Publication date
[2022]
Material Format
Paper
Capacity, size, etc.
1 volume (various pagings) ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
9781510649873
9781510640641 (online)
1510640649 (online)
ISSN (series)
0277-786X
Title
Advanced etch technology and process integration for nanopatterning XI : 24-28 April 2022 : San Jose, California, United States : 23-27 May 2022 : online : 2022, ------.
Series Title
SPIE Proceedings ; 12056
Title Heading
Proceedings of SPIE--the International Society for Optical Engineering ; v. 12056. 1996-756X
Author Heading
author. ： Advanced Etch Technology for Nanopatterning (Conference) (11th : 2022 : San Jose, Calif.)
Bannister, Julie.
Mohant, Nihar.
Publication, Distribution, etc.
Bellingham, Washington, USA : SPIE (出版)
Publication Date
[2022]
Publication Date (W3CDTF)
2022