博士論文

Q-factor and frequency trimming method based on thermoelastic dissipation for MEMS resonator

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Q-factor and frequency trimming method based on thermoelastic dissipation for MEMS resonator

Call No. (NDL)
UT51-2022-B69
Bibliographic ID of National Diet Library
032715735
Material type
博士論文
Author
Hamza Abdelli [著]
Publisher
-
Publication date
[2021]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士(工学)
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Paper

Material Type
博士論文
Author/Editor
Hamza Abdelli [著]
Author Heading
Abdelli Hamza アブデリ ハムザ
Publication Date
[2021]
Publication Date (W3CDTF)
2021
Extent
1冊
Alternative Title
MEMS振動子のための熱弾性損失に基づくQ値と周波数のトリミング方法 MEMS シンドウシ ノ タメ ノ ネツ ダンセイ ソンシツ ニ モトズク Qチ ト シュウハスウ ノ トリミング ホウホウ
Degree grantor/type
東北大学
Date Granted
令和3年9月24日