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図書

次世代半導体用の難加工結晶材料のための超精密加工技術

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次世代半導体用の難加工結晶材料のための超精密加工技術

Call No. (NDL)
ND371-R37
Bibliographic ID of National Diet Library
034333598
Material type
図書
Author
會田英雄, 土肥俊郎 監修
Publisher
R&D支援センター
Publication date
2024.4
Material Format
Paper
Capacity, size, etc.
538 p ; 26 cm
NDC
549.8
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Paper

Material Type
図書
ISBN
978-4-905507-71-0
Title Transcription
ジセダイ ハンドウタイヨウ ノ ナンカコウ ケッショウ ザイリョウ ノ タメノ チョウセイミツ カコウ ギジュツ
Author/Editor
會田英雄, 土肥俊郎 監修
Author Heading
監修者 : 會田, 英雄 アイダ, ヒデオ ( 033928493 )Authorities
監修者 : 土肥, 俊郎, 1947- ドイ, トシロウ, 1947- ( 00413159 )Authorities
Publication, Distribution, etc.
Publication Date
2024.4
Publication Date (W3CDTF)
2024
Extent
538 p