図書

窒化ホウ素超薄膜コーティングされたシリコンの耐酸化性テスト (JAEA-Research 2006-039)

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窒化ホウ素超薄膜コーティングされたシリコンの耐酸化性テスト

(JAEA-Research 2006-039)

Material type
図書
Author
下山 巖 [ほか]
Publisher
日本原子力研究開発機構
Publication date
2006.
Material Format
Paper
Capacity, size, etc.
33
NDC
-
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Paper

Material Type
図書
Author/Editor
下山 巖 [ほか]
Publication, Distribution, etc.
Publication Date
2006.
Publication Date (W3CDTF)
2006
Extent
33
Place of Publication (Country Code)
ja