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図書

Resists in microlithography and printing. (Materials science monographs, 76) 2nd rev. ed

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Resists in microlithography and printing. (Materials science monographs, 76)

2nd rev. ed

Material type
図書
Author
Bednar, B./Kralicek, J./and others
Publisher
Elsevier
Publication date
1993.
Material Format
Paper
Capacity, size, etc.
25 cm; 376
NDC
-
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Paper

Material Type
図書
ISBN
0444988467
Author/Editor
Bednar, B./Kralicek, J./and others
Edition
2nd rev. ed
Publication, Distribution, etc.
Publication Date
1993.
Publication Date (W3CDTF)
1993
Extent
25 cm; 376