FORMATION OF NANOSCALE COBALT SILICIDE AND GOLD WIRES USING ELECTRON BEAM AND CHEMICALLY ENHANCED VAPOR ETCHING, (U) (ADA ; ADA-310968)

FORMATION OF NANOSCALE COBALT SILICIDE AND GOLD WIRES USING ELECTRON BEAM AND CHEMICALLY ENHANCED VAPOR ETCHING, (U)

(ADA ; ADA-310968)

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

Japan Atomic Energy Agency's Library Catalog
Paper
Japan Atomic Energy Agency's Library Catalog

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
Title: FORMATION OF NANOSCALE COBALT SILICIDE AND GOLD WIRES USING ELECTRON BEAM AND CHEMICALLY ENHANCED VAPOR ETCHING, (U)
Author/Editor: ARIZONA STATE UNIV TEMPE J ALLGAIR//ET AL
Series Title: ADA ; ADA-310968
Author Heading: ARIZONA STATE UNIV TEMPE J ALLGAIR
Publication Date: 1996.
Publication Date (W3CDTF): 1996
Text Language Code: eng
Target Audience: 一般
Data Provider (Database): 日本原子力研究開発機構 : 日本原子力研究開発機構所蔵目録データベース
https://library-documents.jaea.go.jp/opac/opac_search/