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図書

IN SITU SURFACE ROUGHNESS MEASUREMENT DURING PECVD DIAMOND FILM GROWTH (ANL ; ANL/CHM/CP-85037)

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IN SITU SURFACE ROUGHNESS MEASUREMENT DURING PECVD DIAMOND FILM GROWTH

(ANL ; ANL/CHM/CP-85037)

Material type
図書
Author
ZUIKER, C.D.// GRUEN, D.M.// KRAUSS, A.R. (ARGONNE NATIONAL LAB., IL (UNITED STATES))
Publisher
Argonne National Laboratory(Argonne National Laboratory)
Publication date
1995.
Material Format
Paper
Capacity, size, etc.
7
NDC
-
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Paper

Material Type
図書
Title
IN SITU SURFACE ROUGHNESS MEASUREMENT DURING PECVD DIAMOND FILM GROWTH
Author/Editor
ZUIKER, C.D.// GRUEN, D.M.// KRAUSS, A.R. (ARGONNE NATIONAL LAB., IL (UNITED STATES))
Series Title
ANL ; ANL/CHM/CP-85037
Author Heading
ZUIKER, C.D.
GRUEN, D.M.
KRAUSS, A.R.
Publication, Distribution, etc.
Argonne National Laboratory(Argonne National Laboratory)
Publication Date
1995.
Publication Date (W3CDTF)
1995
Extent
7
Place of Publication (Country Code)
us