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図書

ELECTRIC FIELD DEPENDENT PARAMAGNETIC DEFECT CREATION IN SINGLE STEP IMPLANTED SIMOX FILMS. (CEA-CONF ; CEA-CONF-11028)

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ELECTRIC FIELD DEPENDENT PARAMAGNETIC DEFECT CREATION IN SINGLE STEP IMPLANTED SIMOX FILMS.

(CEA-CONF ; CEA-CONF-11028)

Material type
図書
Author
LERAY, J.L.// AND OTHERS(CEA CENTRE D'ETUDES DE BRUYERES-LE-CHATEL 91(FRANCE).)
Publisher
Commissariat à l'énergie atomique et aux énergies alternatives(Commissariat à l'énergie atomique et aux énergies alternatives)
Publication date
1991.
Material Format
Paper
Capacity, size, etc.
-
NDC
-
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Paper

Material Type
図書
Title
ELECTRIC FIELD DEPENDENT PARAMAGNETIC DEFECT CREATION IN SINGLE STEP IMPLANTED SIMOX FILMS.
Author/Editor
LERAY, J.L.// AND OTHERS(CEA CENTRE D'ETUDES DE BRUYERES-LE-CHATEL 91(FRANCE).)
Series Title
CEA-CONF ; CEA-CONF-11028
Author Heading
LERAY, J.L.
AND OTHERS
Publication, Distribution, etc.
Commissariat à l'énergie atomique et aux énergies alternatives(Commissariat à l'énergie atomique et aux énergies alternatives)
Publication Date
1991.
Publication Date (W3CDTF)
1991
Place of Publication (Country Code)
fr
Text Language Code
eng