図書

STUDIES ON ION SCATTERING AND SPUTTERING PROCESSES IN ION BEAM SPUTTER-DEPOSITION OF HIGH /TC/ SUPERCONDUCTING FILMS: THE OPTIMIZATION OF DEPOSITION PARAMETERS (CONF ; CONF-891093-29)

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STUDIES ON ION SCATTERING AND SPUTTERING PROCESSES IN ION BEAM SPUTTER-DEPOSITION OF HIGH /TC/ SUPERCONDUCTING FILMS: THE OPTIMIZATION OF DEPOSITION PARAMETERS

(CONF ; CONF-891093-29)

Material type
図書
Author
(ARGONNE NATIONAL LAB., IL (USA) // NORTH CAROLINA STATE UNIV., RALEIGH, NC (USA). DEPT. OF MATERIALS SCIENCE AND ENGINEERING)
Publisher
-
Publication date
1989.
Material Format
Paper
Capacity, size, etc.
8
NDC
-
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Paper

Material Type
図書
Title
STUDIES ON ION SCATTERING AND SPUTTERING PROCESSES IN ION BEAM SPUTTER-DEPOSITION OF HIGH /TC/ SUPERCONDUCTING FILMS: THE OPTIMIZATION OF DEPOSITION PARAMETERS
Author/Editor
(ARGONNE NATIONAL LAB., IL (USA) // NORTH CAROLINA STATE UNIV., RALEIGH, NC (USA). DEPT. OF MATERIALS SCIENCE AND ENGINEERING)
Series Title
CONF ; CONF-891093-29
Author Heading
(ARGONNE NATIONAL LAB., IL (USA
NORTH CAROLINA STATE UNIV., RALEIGH, NC
Publication Date
1989.
Publication Date (W3CDTF)
1989
Extent
8
Place of Publication (Country Code)
us
Text Language Code
eng