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図書

PLASMALOSES UND IASERINDUZIERTES AETZEN VON SILICIUM MIT DEN HALOGENEN FLUOR, CHLOR UND BROM (FZKA ; FZKA-5574)

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PLASMALOSES UND IASERINDUZIERTES AETZEN VON SILICIUM MIT DEN HALOGENEN FLUOR, CHLOR UND BROM

(FZKA ; FZKA-5574)

Material type
図書
Author
KOEHLER, U./GUBER, A.
Publisher
Forschungszentrum Karlsruhe GmbH Technik und Umwelt(Forschungszentrum Karlsruhe GmbH Technik und Umwelt)
Publication date
1995.
Material Format
Paper
Capacity, size, etc.
52
NDC
-
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Paper

Material Type
図書
Title
PLASMALOSES UND IASERINDUZIERTES AETZEN VON SILICIUM MIT DEN HALOGENEN FLUOR, CHLOR UND BROM
Author/Editor
KOEHLER, U./GUBER, A.
Series Title
FZKA ; FZKA-5574
Author Heading
KOEHLER, U.
GUBER, A.
Publication, Distribution, etc.
Forschungszentrum Karlsruhe GmbH Technik und Umwelt(Forschungszentrum Karlsruhe GmbH Technik und Umwelt)
Publication Date
1995.
Publication Date (W3CDTF)
1995
Extent
52
Place of Publication (Country Code)
gw