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図書

STUDY OF DEPOSITION CONDITIONS AND HYDROGEN MOTION IN RF SPUTTERED HYDROGENATED AMORPHOUS SILICON. (IS ; IS-T-1309)

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STUDY OF DEPOSITION CONDITIONS AND HYDROGEN MOTION IN RF SPUTTERED HYDROGENATED AMORPHOUS SILICON.

(IS ; IS-T-1309)

Material type
図書
Author
ALBERS, M.L.
Publisher
Ames Laboratory(Ames Laboratory)
Publication date
1987.
Material Format
Paper
Capacity, size, etc.
158
NDC
-
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Paper

Material Type
図書
Title
STUDY OF DEPOSITION CONDITIONS AND HYDROGEN MOTION IN RF SPUTTERED HYDROGENATED AMORPHOUS SILICON.
Author/Editor
ALBERS, M.L.
Series Title
IS ; IS-T-1309
Author Heading
ALBERS, M.L.
Publication, Distribution, etc.
Ames Laboratory(Ames Laboratory)
Publication Date
1987.
Publication Date (W3CDTF)
1987
Extent
158
Place of Publication (Country Code)
us