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図書

SELEKTIVES WACHSTUM VON SI UND SIGE MITTELS LPCVD IM HINBLICK AUF VERTIKALE MOSFET-ANWENDUNGEN (JUEL ; JUEL-3328)

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SELEKTIVES WACHSTUM VON SI UND SIGE MITTELS LPCVD IM HINBLICK AUF VERTIKALE MOSFET-ANWENDUNGEN

(JUEL ; JUEL-3328)

Material type
図書
Author
LOO, R.
Publisher
-
Publication date
1996.
Material Format
Paper
Capacity, size, etc.
172
NDC
-
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Paper

Material Type
図書
Author/Editor
LOO, R.
Series Title
Author Heading
Publication Date
1996.
Publication Date (W3CDTF)
1996
Extent
172
Place of Publication (Country Code)
gw
Text Language Code
ger