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図書

PHYSICAL PROCESSES IN DIRECTED ION BEAM SPUTTERING (NASA ; NASA-CR-159567; N79-26943)

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PHYSICAL PROCESSES IN DIRECTED ION BEAM SPUTTERING

(NASA ; NASA-CR-159567; N79-26943)

Material type
図書
Author
ROBINSON,R.S.
Publisher
National Aeronautics and Space Administration(National Aeronautics and Space Administration)
Publication date
-
Material Format
Paper
Capacity, size, etc.
153
NDC
-
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Paper

Material Type
図書
Author/Editor
ROBINSON,R.S.
Author Heading
Extent
153
Place of Publication (Country Code)
us
Text Language Code
eng
Target Audience
一般