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図書

FORMATION OF MULTIPLE LEVELS OF POROUS SILICON FOR BURIED INSULATORS AND CONDUCTORS IN SILICON DEVICE TECHNOLOGIES (PATENTS-US ; PATENTS-US-A7274892)

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FORMATION OF MULTIPLE LEVELS OF POROUS SILICON FOR BURIED INSULATORS AND CONDUCTORS IN SILICON DEVICE TECHNOLOGIES

(PATENTS-US ; PATENTS-US-A7274892)

Material type
図書
Author
BLEWER, R.S.// GUILINGER, T.R.// KELLY, M.J.// TSAO, S.S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))
Publisher
-
Publication date
1988.
Material Format
Paper
Capacity, size, etc.
26
NDC
-
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Paper

Material Type
図書
Author/Editor
BLEWER, R.S.// GUILINGER, T.R.// KELLY, M.J.// TSAO, S.S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))
Publication Date
1988.
Publication Date (W3CDTF)
1988
Extent
26
Place of Publication (Country Code)
us
Text Language Code
eng