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図書

CARRIER-LIFETIME-CONTROLLED SELECTIVE ETCHING PROCESS FOR SEMICONDUCTORS USING PHOTOCHEMICAL ETCHING (PATENTS-US ; PATENTS-US-A7441025)

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CARRIER-LIFETIME-CONTROLLED SELECTIVE ETCHING PROCESS FOR SEMICONDUCTORS USING PHOTOCHEMICAL ETCHING

(PATENTS-US ; PATENTS-US-A7441025)

Material type
図書
Author
ASHBY,C.I.H.//MYERS,D.R.(SANDIA NATIONAL LABS.,ALBUQUERQUE,NM(USA))
Publisher
-
Publication date
1989.
Material Format
Paper
Capacity, size, etc.
12
NDC
-
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Paper

Material Type
図書
Title
CARRIER-LIFETIME-CONTROLLED SELECTIVE ETCHING PROCESS FOR SEMICONDUCTORS USING PHOTOCHEMICAL ETCHING
Author/Editor
ASHBY,C.I.H.//MYERS,D.R.(SANDIA NATIONAL LABS.,ALBUQUERQUE,NM(USA))
Series Title
PATENTS-US ; PATENTS-US-A7441025
Author Heading
ASHBY,C.I.H.
MYERS,D.R.
Publication Date
1989.
Publication Date (W3CDTF)
1989
Extent
12
Place of Publication (Country Code)
us
Text Language Code
eng