VIRTUALLY DISTORTION-FREE IMAGING SYSTEM FOR LARGE FIELD, HIGH RESOLUTION LITHOGRAPHY USING ELECTRONS, IONS OR OTHER PARTICLE BEAMS (PATENTS-US ; PATENTS-US-A7683011)

VIRTUALLY DISTORTION-FREE IMAGING SYSTEM FOR LARGE FIELD, HIGH RESOLUTION LITHOGRAPHY USING ELECTRONS, IONS OR OTHER PARTICLE BEAMS

(PATENTS-US ; PATENTS-US-A7683011)

Material type: 図書

Author: HAWRYLUK, A.M.// CEGLIO, N.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))

Publisher: -

Publication date: 1991.

Material Format: Paper

Capacity, size, etc.: 21

NDC: -

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Paper

Material Type: 図書
Title: VIRTUALLY DISTORTION-FREE IMAGING SYSTEM FOR LARGE FIELD, HIGH RESOLUTION LITHOGRAPHY USING ELECTRONS, IONS OR OTHER PARTICLE BEAMS
Author/Editor: HAWRYLUK, A.M.// CEGLIO, N.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))
Series Title: PATENTS-US ; PATENTS-US-A7683011
Author Heading: HAWRYLUK, A.M.
CEGLIO, N.M.
Publication Date: 1991.
Publication Date (W3CDTF): 1991
Extent: 21
Place of Publication (Country Code): us
Text Language Code: eng
Target Audience: 一般
Data Provider (Database): 日本原子力研究開発機構 : 日本原子力研究開発機構所蔵目録データベース
https://library-documents.jaea.go.jp/opac/opac_search/