SELECTIVE, DEEP SI TRENCH ETCHING WITH DIMENSIONAL CONTROL (SAND ; SAND-98-0490C)

SELECTIVE, DEEP SI TRENCH ETCHING WITH DIMENSIONAL CONTROL

(SAND ; SAND-98-0490C)

Author: R. J. SHUL//ET AL. (USDOE OFFICE OF FINANCIAL MANAGEMENT AND CONTROLLER, WASHINGTON, DC (UNITED STATES))

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Material Type: 図書
Title: SELECTIVE, DEEP SI TRENCH ETCHING WITH DIMENSIONAL CONTROL
Author/Editor: R. J. SHUL//ET AL. (USDOE OFFICE OF FINANCIAL MANAGEMENT AND CONTROLLER, WASHINGTON, DC (UNITED STATES))
Series Title: SAND ; SAND-98-0490C
Author Heading: R. J. SHUL.
Publication, Distribution, etc.: Sandia National Laboratories(Sandia National Laboratories)
Publication Date: 1998.
Publication Date (W3CDTF): 1998
Extent: 12
Place of Publication (Country Code): us
Text Language Code: eng
Target Audience: 一般
Data Provider (Database): 日本原子力研究開発機構 : 日本原子力研究開発機構所蔵目録データベース
https://library-documents.jaea.go.jp/opac/opac_search/