図書

INTEGRATION OF SURFACE MICROMACHINED DEVICES WITH OPTOELECTRONICS: TECHNOLOGY AND APPLICATIONS (SAND ; SAND-98-0913C)

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INTEGRATION OF SURFACE MICROMACHINED DEVICES WITH OPTOELECTRONICS: TECHNOLOGY AND APPLICATIONS

(SAND ; SAND-98-0913C)

Material type
図書
Author
M. E. WARREN//ET AL. (USDOE, WASHINGTON, DC)
Publisher
Sandia National Laboratories(Sandia National Laboratories)
Publication date
1998.
Material Format
Paper
Capacity, size, etc.
5
NDC
-
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Paper

Material Type
図書
Title
INTEGRATION OF SURFACE MICROMACHINED DEVICES WITH OPTOELECTRONICS: TECHNOLOGY AND APPLICATIONS
Author/Editor
M. E. WARREN//ET AL. (USDOE, WASHINGTON, DC)
Series Title
SAND ; SAND-98-0913C
Author Heading
M. E. WARREN.
Publication, Distribution, etc.
Sandia National Laboratories(Sandia National Laboratories)
Publication Date
1998.
Publication Date (W3CDTF)
1998
Extent
5
Place of Publication (Country Code)
us