VERIFICATION OF FREQUENCY SCALING LAWS FOR CAPACITIVE RF DISCHARGES USING TWO-DIMENSIONAL SIMULATIONS (UCB ; UCB/ERL-M-92/146)

VERIFICATION OF FREQUENCY SCALING LAWS FOR CAPACITIVE RF DISCHARGES USING TWO-DIMENSIONAL SIMULATIONS

(UCB ; UCB/ERL-M-92/146)

Author: VAHEDI, V.// BIRDSALL, C.K.// LIEBERMAN, M.A.// DIPESO, G.// ROGNLIEN, T.D. (CALIFORNIA UNIV., BERKELEY, CA (UNITED STATES). ELECTRONICS RESEARCH LAB.)

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Material Type: 図書
Title: VERIFICATION OF FREQUENCY SCALING LAWS FOR CAPACITIVE RF DISCHARGES USING TWO-DIMENSIONAL SIMULATIONS
Author/Editor: VAHEDI, V.// BIRDSALL, C.K.// LIEBERMAN, M.A.// DIPESO, G.// ROGNLIEN, T.D. (CALIFORNIA UNIV., BERKELEY, CA (UNITED STATES). ELECTRONICS RESEARCH LAB.)
Series Title: UCB ; UCB/ERL-M-92/146
Author Heading: VAHEDI, V.
BIRDSALL, C.K.
LIEBERMAN, M.A.
DIPESO, G.
ROGNLIEN, T.D.
Publication Date: 1992.
Publication Date (W3CDTF): 1992
Extent: 35
Target Audience: 一般
Data Provider (Database): 日本原子力研究開発機構 : 日本原子力研究開発機構所蔵目録データベース
https://library-documents.jaea.go.jp/opac/opac_search/