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図書

SOFT X-RAY PROJECTION LITHOGRAPHY SYSTEM DESIGN AND COST ANALYSIS (UCRL ; UCRL-JC-108670)

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SOFT X-RAY PROJECTION LITHOGRAPHY SYSTEM DESIGN AND COST ANALYSIS

(UCRL ; UCRL-JC-108670)

Material type
図書
Author
CEGLIO, N.M.// HAWRYLUK, A.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))
Publisher
University of California Research Laboratory(University of California Research Laboratory)
Publication date
1991.
Material Format
Paper
Capacity, size, etc.
20
NDC
-
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Paper

Material Type
図書
Title
SOFT X-RAY PROJECTION LITHOGRAPHY SYSTEM DESIGN AND COST ANALYSIS
Author/Editor
CEGLIO, N.M.// HAWRYLUK, A.M. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))
Series Title
UCRL ; UCRL-JC-108670
Author Heading
CEGLIO, N.M.
HAWRYLUK, A.M.
Publication, Distribution, etc.
University of California Research Laboratory(University of California Research Laboratory)
Publication Date
1991.
Publication Date (W3CDTF)
1991
Extent
20
Place of Publication (Country Code)
us