Jump to main content
図書

SURFACE CHARACTERIZATION OF OPTICS FOR EUV LITHOGRAPHY (UCRL ; UCRL-JC-123042)

Icons representing 図書

SURFACE CHARACTERIZATION OF OPTICS FOR EUV LITHOGRAPHY

(UCRL ; UCRL-JC-123042)

Material type
図書
Author
GAINES, D.P.// SWEENEY, D.W.// DELONG, K.W.// VERNON, S.P.// BAKER, S.L.// TICHENOR, D.A.// KESTNER, R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))
Publisher
University of California Research Laboratory(University of California Research Laboratory)
Publication date
1996.
Material Format
Paper
Capacity, size, etc.
6
NDC
-
View All

Search by Bookstore

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
Author/Editor
GAINES, D.P.// SWEENEY, D.W.// DELONG, K.W.// VERNON, S.P.// BAKER, S.L.// TICHENOR, D.A.// KESTNER, R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))
Publication Date
1996.
Publication Date (W3CDTF)
1996
Extent
6
Place of Publication (Country Code)
us