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図書

Experimental design applied to the etching of silicon nitride in HF solutions (SAND ; SAND-85-2332; DE86011996)

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Experimental design applied to the etching of silicon nitride in HF solutions

(SAND ; SAND-85-2332; DE86011996)

Material type
図書
Author
Guilinger., T.R., Kelly, M.J., Weygandt, W.S.
Publisher
Sandia National Labs., New Mexico Univ., Dept. of Chemical Engineering
Publication date
1986.05.
Material Format
Paper
Capacity, size, etc.
30p
NDC
-
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Paper

Material Type
図書
Title
Experimental design applied to the etching of silicon nitride in HF solutions
Author/Editor
Guilinger., T.R., Kelly, M.J., Weygandt, W.S.
Series Title
SAND ; SAND-85-2332; DE86011996
Author Heading
Guilinger., T.R.
Kelly, M.J.
Weygandt, W.S.
Publication, Distribution, etc.
Albuquerque, NM (USA) : Sandia National Labs., New Mexico Univ., Dept. of Chemical Engineering
Publication Date
1986.05.
Publication Date (W3CDTF)
1986
Extent
30p
Place of Publication (Country Code)
us