図書

Effectiveness of thin film encapsulants for reducing evaporation during rapid thermal processing of GaAs (Sandia report ; SAND-86-1409C; CONF-861207-37; DE87003513)

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Effectiveness of thin film encapsulants for reducing evaporation during rapid thermal processing of GaAs

(Sandia report ; SAND-86-1409C; CONF-861207-37; DE87003513)

Material type
図書
Author
Haynes, T.E., Picraux, S.T., Chu, W.K.
Publisher
North Carolina Univ., Dept. of Physics and Astronomy; Sandia National Labs.
Publication date
1986.01.
Material Format
Paper
Capacity, size, etc.
7p
NDC
-
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Paper

Material Type
図書
Author/Editor
Haynes, T.E., Picraux, S.T., Chu, W.K.
Publication Date
1986.01.
Extent
7p
Place of Publication (Country Code)
us
Text Language Code
eng