図書

Semiconductor measurement technology: Analytic analysis of ellipsometric errors. (Final Rept.) (NBS/SP ; NBS/SP-400/78; PB86-230380)

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Semiconductor measurement technology: Analytic analysis of ellipsometric errors. (Final Rept.)

(NBS/SP ; NBS/SP-400/78; PB86-230380)

Material type
図書
Author
Chandler-Horowitz, D.
Publisher
National Bureau of Standards
Publication date
1986.5.
Material Format
Paper
Capacity, size, etc.
39p
NDC
-
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Paper

Material Type
図書
Title
Semiconductor measurement technology: Analytic analysis of ellipsometric errors. (Final Rept.)
Author/Editor
Chandler-Horowitz, D.
Series Title
NBS/SP ; NBS/SP-400/78; PB86-230380
Author Heading
Chandler-Horowitz, D.
Publication, Distribution, etc.
Gaithersburg, MD (USA) : National Bureau of Standards
Publication Date
1986.5.
Publication Date (W3CDTF)
1986
Extent
39p
Text Language Code
eng