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An in-situ spectroscopic erosion yield measurement with applications to sputtering and surface morphology alterations (UCLA/PPG ; UCLA/PPG-1167)

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An in-situ spectroscopic erosion yield measurement with applications to sputtering and surface morphology alterations

(UCLA/PPG ; UCLA/PPG-1167)

Material type
図書
Author
Leung, W.K. [et al.]
Publisher
California Univ., Dept. of Mechanical, Aerospace and Nuclear Engineering
Publication date
1988.7.
Material Format
Paper
Capacity, size, etc.
21 p.
NDC
-
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Paper

Material Type
図書
Title
An in-situ spectroscopic erosion yield measurement with applications to sputtering and surface morphology alterations
Author/Editor
Leung, W.K. [et al.]
Series Title
UCLA/PPG ; UCLA/PPG-1167
Author Heading
Leung, W.K.
Hirooka, Y.
Conn, R.W.
Goebel, D.M.
LaBombard, B.
Nygren, R.E.
Publication, Distribution, etc.
Los Angeles, CA (USA) : California Univ., Dept. of Mechanical, Aerospace and Nuclear Engineering
Publication Date
1988.7.
Publication Date (W3CDTF)
1988
Extent
21 p.
Place of Publication (Country Code)
us