Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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- Material Type
- 電子書籍・電子雑誌雑誌
- ISSN
- 1520-8567
- Publication, Distribution, etc.
- Abbreviated Title
- J VAC SCI BJ VAC SCI TECHNOL BJ VAC SCI TECHNOL B MICROELECTRON NANOMETER STRUCT PROCESS MEAS PHENOMJ. VAC. SCI. TECHNOL. BJOURNAL OF VACUUM SCIENCE & TECHNOLOGYJournal of Vacuum Science & Technology BJOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, MICROELECTRONICS & NANOMETER STRUCTURESJOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, MICROELECTRONICS AND NANOMETER STRUCTURESJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY BJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURESJOURNAL OF VACUUM SCIENCE TECHNOLOGY B
- Text Language Code
- eng
- Target Audience
- 一般
- Access Restrictions
- 国立国会図書館内限定公開
- Service for the Digitized Contents Transmission Service
- 図書館・個人送信対象外