Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California [v. 1] [v. 2]

Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California [v. 1]

Material type: 図書

Author: Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Publisher: SPIE

Publication date: c1999

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Note (General)：: Includes bibliographical references and author index

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Paper

Material Type: 図書
ISBN: 0819431508
Title: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California
Volume: [v. 1]
[v. 2]
Author/Editor: Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Author Heading: Vladimirsky, Yuli
Society of Photo-optical Instrumentation Engineers
Semiconductor Equipment and Materials International
Publication, Distribution, etc.: SPIE
Publication Date: c1999
Publication Date (W3CDTF): 1999
Size: 28 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Lithography, Electron beam -- Congresses
Microlithography -- Industrial applications -- Congresses
X-ray lithography -- Congresses
X-rays -- Industrial applications -- Congresses
Masks (Electronics) -- Congresses
LCC: TK7874
Target Audience: 一般
Note (General): Includes bibliographical references and author index
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Related Material (URI): https://ci.nii.ac.jp/ncid/BA60526097#entity
https://lccn.loc.gov/00268968
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA60526097 : BA60526097
LC Control Number: 00268968
https://lccn.loc.gov/00268968