多結晶薄膜のX線応力測定と強度評価に関する研究

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Material Type: 図書
Title: 多結晶薄膜のX線応力測定と強度評価に関する研究
Title Transcription: タケッショウウスマクノ Xセンオウリョクソクテイトキョウドヒョウカニカンスルケンキュウ
Author/Editor: 伊藤登史政 [著]
Author Heading: 伊藤, 登史政イトウ, トシマサ
Publication, Distribution, etc.: [出版者不明]
Publication Date: [2002]
Publication Date (W3CDTF): 2002
Size: 30cm
Text Language Code: ja
Target Audience: 一般
Note (General): 名古屋大学2002年度博士論文
学位の種類: 博士(工学)
学位授与年月日: 2003-03-25
報告番号: 甲第5852号
学位記番号: 工博第1736号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB13686594#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB13686594 : BB13686594