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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- マイクロハ レーザ ケイソク ギジュツ ノ カイハツ ト シリコンウェーハ ノ キョクショテキ ドウデンリツ ノ ヒセッショク ケイソク
- Author/Editor
- 研究代表者 巨陽
- Author Heading
- 巨, 陽 キョ, ヨウ
- Publication, Distribution, etc.
- Publication Date
- 2003.3
- Publication Date (W3CDTF)
- 2003
- Size
- 30cm
- Alternative Title
- 平成13年度～平成14年度科学研究費補助金(基盤研究(B)(2))研究成果報告書Development of a microwave-Laser measurement technique and contactless measurement of conductivity of silicon wafer in an infinitesimal area