高密度反応性プラズマにおける負イオンの生成と診断

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Material Type: 図書
Title: 高密度反応性プラズマにおける負イオンの生成と診断
Title Transcription: コウミツドハンノウセイプラズマニオケルフイオンノセイセイトシンダン
Author/Editor: 林大雄 [著]
Author Heading: 林, 大雄ハヤシ, ダイユウ
Publication, Distribution, etc.: [出版者不明]
Publication Date: [1999]
Publication Date (W3CDTF): 1999
Size: 30cm
Text Language Code: ja
Target Audience: 一般
Note (General): 名古屋大学大学院工学研究科1998年度博士論文
学位の種類: 博士(工学)
学位授与年月日: 1999-03-25
報告番号: 甲第4284号
学位記番号: 工博第1290号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB14061740#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB14061740 : BB14061740