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CiNii Research
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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- TEOS-CVD プロセス ニ オケル イオンカ セイマク ギジュツ ノ カクリツ
- Author/Editor
- 足立元明研究代表
- Author Heading
- 足立, 元明 アダチ, モトアキ
- Publication, Distribution, etc.
- Publication Date
- 1995.3
- Publication Date (W3CDTF)
- 1995
- Size
- 30cm
- Place of Publication (Country Code)
- ja