不揮発性メモリの実現に向けた高誘電率キャパシタ材料の低温形成

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Material Type: 図書
Title: 不揮発性メモリの実現に向けた高誘電率キャパシタ材料の低温形成
Title Transcription: フキハツセイメモリノジツゲンニムケタコウユウデンリツキャパシタザイリョウノテイオンケイセイ
Author/Editor: 研究代表者光田好孝
Author Heading: 光田, 好孝ミツダ, ヨシタカ
https://ci.nii.ac.jp/author/DA12441320
Publication, Distribution, etc.: [光田好孝]
Publication Date: 2006.3
Publication Date (W3CDTF): 2006
Size: 31cm
Alternative Title: 平成13年度〜平成15年度科学研究費補助金(基盤研究(B)(2)(展開))研究成果報告書
科学研究費補助金(基盤研究(B)(2)(展開))研究成果報告書
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 課題番号: 13455194
研究分担者: 小田克郎
Related Material (URI): https://ci.nii.ac.jp/ncid/BA80902497#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA80902497 : BA80902497