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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- Silicon oxycarbide films fabricated by using an atmospheric pressure microplasma jet : structural, optical and electrical characterizations = タイキアツ マイクロプラズマ ジェット ニヨリ サクセイ シタ SiOC ハクマク ト ソノ ビサイ コウゾウ コウガク デンキテキ ブッセイ ヒョウカ
- Author/Editor
- 丁毅
- Author Heading
- 丁, 毅 テイ, キ
- Publication, Distribution, etc.
- Publication Date
- 2010.3
- Publication Date (W3CDTF)
- 2010
- Size
- 31 cm
- Place of Publication (Country Code)
- ja