複雑な構造を持つ半導体多層薄膜のX線CTR散乱法による解析

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Material Type: 図書
Title: 複雑な構造を持つ半導体多層薄膜のX線CTR散乱法による解析
Title Transcription: フクザツナコウゾウオモツハンドウタイタソウウスマクノ Xセン CTR サンランホウニヨルカイセキ
Author/Editor: 田淵雅夫 [ほか著]
Author Heading: 田渕, 雅夫タブチ, マサオ
https://ci.nii.ac.jp/author/DA11273912
竹田, 美和タケダ, ヨシカズ
https://ci.nii.ac.jp/author/DA10149678
大渕, 博宣オオブチ, ヒロノブ
Publication, Distribution, etc.: [出版者不明]
Publication Date: 2006.4
Publication Date (W3CDTF): 2006
Size: 30cm
Alternative Title: 平成16年度〜平成17年度科学研究費補助金(基盤研究(B)(2))研究成果報告書
Place of Publication (Country Code): xx
Target Audience: 一般
Note (General): 課題番号:16360006
研究分担者:竹田美和, 大渕博宣
Related Material (URI): https://ci.nii.ac.jp/ncid/BA8001591X#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA8001591X : BA8001591X