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図書

複雑な構造を持つ半導体多層薄膜のX線CTR散乱法による解析

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複雑な構造を持つ半導体多層薄膜のX線CTR散乱法による解析

Material type
図書
Author
田淵雅夫 [ほか著]
Publisher
[出版者不明]
Publication date
2006.4
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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Notes on use

Note (General):

課題番号:16360006研究分担者:竹田美和, 大渕博宣

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Paper

Material Type
図書
Title Transcription
フクザツ ナ コウゾウ オ モツ ハンドウタイ タソウ ウスマク ノ Xセン CTR サンランホウ ニヨル カイセキ
Author/Editor
田淵雅夫 [ほか著]
Publication, Distribution, etc.
Publication Date
2006.4
Publication Date (W3CDTF)
2006
Size
30cm
Alternative Title
平成16年度〜平成17年度科学研究費補助金(基盤研究(B)(2))研究成果報告書