Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida

Publisher: Published for the American Vacuum Society by the American Institute of Physics

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Material Type: 図書
Title: Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida
Author/Editor: special editor for the proceedings, Randy Kubena
Author Heading: International Symposium on Electron, Ion, and Photon Beams
https://ci.nii.ac.jp/author/DA03926114
Kubena, Randy
American Vacuum Society
https://ci.nii.ac.jp/author/DA03926125
Publication, Distribution, etc.: Published for the American Vacuum Society by the American Institute of Physics
Publication Date: 1992
Publication Date (W3CDTF): 1992
Size: 30 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Photolithography -- Congresses
Lithography, Electron beam -- Congresses
Ion beam lithography -- Congresses
X-ray lithography -- Congresses
Photoresists -- Congresses
LCC: TR940
Target Audience: 一般
Note (General): Includes index
Related Material: Journal of vacuum science & technology
https://cir.nii.ac.jp/crid/1130000797417835392
Related Material (URI): https://ci.nii.ac.jp/ncid/BA27918442#entity
Periodical Title: Journal of vacuum science & technology
https://cir.nii.ac.jp/crid/1130000797417835392
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA27918442 : BA27918442