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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 089252250X
- Volume
- pbk.
- Author/Editor
- Jim Dey, editor ; presented by the Society of Photo-optical Instrumentation Engineers in cooperation with the Northern California Microphotomask/Masking Working Group and the International Society for Hybrid Microelectronics
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c1980
- Publication Date (W3CDTF)
- 1980
- Size
- 28 cm